Stock code 002514
Stock code 002514
It is used to remove impurities on the surface of silicon wafer, form pyramid suede on the surface of silicon wafer and reduce the reflectivity of silicon wafer surface.
Equipment performance
Capacity: up to 8000 Wafers / hour
Effective utilization rate of equipment: ≥ 97%
Fragment rate: M12 ≤ 0.01%
Silicon wafer specification
Silicon wafer thickness: ≥ 160 μ m
Silicon wafer size: 182 * 182-230 * 230mm
Flower basket type: low surface carrier (LSC) made by PVDF
Space between flower baskets: 4.76mm
Basket capacity: 100 wafers
Manipulator system
Manipulator: 8 sets
Servo motor: 16 PC
Lift time: less than 22 sec
Equipment size
Length * width * height: 27300 * 3200 * 2650mm
direction
Working direction：Left→Right / Right→Left（TBD）
power supply
Power supply: AC380V 3Ph + PE + n 50Hz (TBD)
Control power supply: DC 24V
Full load power supply: 230kw / 175kW
Recommended maximum fuse size: 225A / 135a
Installation requirements
Minimum ground bearing capacity: 750KG / ㎡
Minimum workshop height: 3.5m
Clean room level: iso7 (10K class)
Ambient temperature: 17 ℃＜ RT ＜ 30 ℃
Maximum humidity: 70%